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Recent Advances in Cubic Boron Nitride Deposition

Published online by Cambridge University Press:  31 January 2011

W.J. Zhang ,
I. Bello ,
Y. Lifshitz  and
S. T. Lee
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Abstract

This article reviews recent progress in the deposition of thick, adherent, cubic boron nitride (c-BN) films. Most of the previous work applied ion-assisted physical vapor deposition methods to deposit c-BN films. The ion impact was successful in nucleating c-BN crystallites, but it resulted in a very small crystallite size and introduced stress, which caused the delamination of films thicker than 100 nm. Recent efforts to reduce the stress and obtain thicker films are described. The limited success of these attempts motivated us to explore chemical vapor deposition methods based on fluorine chemistry. We review this work, detailing the success of depositing thick (>20 μ), stress-free, adherent films with a larger crystallite size and significantly better crystalline quality.

Keywords

chemical vapor deposition (CVD)superhard coating materialsthin films
Type
Research Article
Information
MRS Bulletin , Volume 28 , Issue 3: Superhard Coating Materials , March 2003 , pp. 184 - 188
Copyright
Copyright © Materials Research Society 2003

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