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Amorphous Silicon Films and Solar Cells Prepared by Mercury-Sensitized Photo-CVD of Silane and Disilane

Published online by Cambridge University Press:  28 February 2011

Alan E. Delahoy ,
B. Doele ,
F.B. Ellis Jr ,
K.R. Ramaprasad ,
T. Tonon  and
J. Van Dine
Alan E. Delahoy
Affiliation:
Chronar Corp., Princeton, NJ 08542, USA
B. Doele
Affiliation:
Chronar Corp., Princeton, NJ 08542, USA
F.B. Ellis Jr
Affiliation:
Chronar Corp., Princeton, NJ 08542, USA
K.R. Ramaprasad
Affiliation:
Chronar Corp., Princeton, NJ 08542, USA
T. Tonon
Affiliation:
Chronar Corp., Princeton, NJ 08542, USA
J. Van Dine
Affiliation:
Chronar Corp., Princeton, NJ 08542, USA
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Abstract

The low temperature deposition of a-Si:H films and devices by mercurysensitized photo-decomposition of silanes is described. The problem of window deposition is ameliorated by the use of a perfluoropolyether coating to give deposition rates of 0.3 Å s−1. Highly photosensitive undoped layers can be produced. These films exhibit many properties in common with glow discharge films including thermal quenching of photoconductivity between 125-200°K and the Staebler-Wronski effect. A wide gap silicon carbide p layer is described, and is usefully employed in p-i-n structures to give 6% efficient solar cells. SIMS analysis of these devices shows that it is possible to achieve sharp p-i interfaces in a single chamber reactor. Deposition rates greater than 2 As−1 have recently been achieved.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 49: Symposium F – Materials Issues in Applications of Amorphous Silicon Technology , 1985 , 33
Copyright
Copyright © Materials Research Society 1985

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References

Referrnces

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