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Capacitance Measurement Technique for Determining the Out-of-Plane Coefficient of Thermal Expansion for Low-k Dielectrics

Published online by Cambridge University Press:  01 February 2011

Swarnal Borthakur ,
Andreas Knorr ,
Paul S. Ho  and
Wen-Li Wu
Swarnal Borthakur
Affiliation:
Sematech, The University of Texas at Austin Infineon Technologies
Andreas Knorr
Affiliation:
Sematech, The University of Texas at Austin NIST
Paul S. Ho
Affiliation:
Infineon Technologies
Wen-Li Wu
Affiliation:
Sematech, 2706 Montopolis Drive Austin, TX 78741, USA
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Abstract

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 863: Symposium B – Materials, Technology and Reliability of Advanced Interconnects , 2005 , B8.14
Copyright
Copyright © Materials Research Society 2005

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References

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