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A Chemical Gas Sensor from Large-Scale Thermal CVD Derived Graphene

Published online by Cambridge University Press:  03 March 2011

Xiaojuan Song ,
Brent Wagner  and
Zhitao Kang
Xiaojuan Song*
Affiliation:
Electro-Optical System Lab, Georgia Tech Research Institute, Atlanta, Georgia 30332, U.S.A.
Brent Wagner
Affiliation:
Electro-Optical System Lab, Georgia Tech Research Institute, Atlanta, Georgia 30332, U.S.A.
Zhitao Kang
Affiliation:
Electro-Optical System Lab, Georgia Tech Research Institute, Atlanta, Georgia 30332, U.S.A. School of Material Science Engineering, Georgia Institute of Technology, Atlanta, GA 30332, U.S.A
*
*Address correspondence to: judy.song@gtri.gatech.edu
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Abstract

Large-scale graphene sheets were grown on thin nickel film coated Si substrates using a reliable and repeatable thermal Chemical Vapor Deposition (CVD) technique. The graphene films were then transferred onto a SiO2 coated Si wafer to fabricate a 5 mm x 5 mm resistive sensor structure. Raman spectroscopy analysis confirmed the existence of graphene. Preliminary sensing results were demonstrated by the detection of hazardous gases such as NO2 and MMH (mono-methyl hydrazine). Characterization of the device channel resistivity (switching response) was conducted as a function of the analyte type and concentration. The sensor response indicates a charge transfer mechanism between the analytes and graphene.

Keywords

nanostructurechemical vapor deposition (CVD) (deposition)sensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1303: Symposium Y – Nanomaterials Integration for Electronics, Energy and Sensing , 2011 , mrsf10-1303-y09-03
Copyright
Copyright © Materials Research Society 2011

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References

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