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Published online by Cambridge University Press: 26 February 2011
The carbon concentrations in GaAs and AIGaAs grown by Molecular Beam Epitaxy (MBE) have been studied when a graphite generated dimeric arsenic species and a standard tetramer arsenic species are used as the group-V source. Photoluminescence and Van der Pauw-Hall measurements have been made to examine the material quality in reference to which arsenic species is used for film growth. Results indicate that a graphite crucible arrangement for the thermal cracking of As4 produces significant carbon contamination and is unacceptable for the MBE growth of GaAs and AlGaAs.