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Deep Luminescence from ‘Relaxed’ Si1−xGex Epitaxial Layers
Published online by Cambridge University Press: 22 February 2011
Abstract
In MBE Si1−xGex which is grown to thicknesses greater than the critical thickness hc, the dislocation-related luminescence peaks Dl and D2 have energies which are independent of x up to x ≈ 0.3, and then decrease, as observed in LPE Si1−xGex. In MBE Si1−xGex layers grown to thicknesses less than hc, post-growth annealing produces dramatic changes in the luminescence, giving spectra as from relaxed alloy, even though the relaxation determined by X-rays is negligible. These results establish photoluminescence as a sensitive diagnostic tool for detecting dislocations in Si1−xGe*.
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- Copyright © Materials Research Society 1991
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