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Development of a low energy Ne atom scattering system for insulator surface strctural analysis

Published online by Cambridge University Press:  26 February 2011

Kenji Umezawa ,
E Narihiro ,
K Oda ,
Shigemitsu Nakanishi  and
Walter M Gibson
Kenji Umezawa
Affiliation:
umezawa@las.osakafu-u.ac.jp, Osaka Prefecture University, Physics, 1-1 Gakuen-Cho, Sakai, Osaka, 599-8531, Japan, 81-72-254-9719, 81-72-254-9719
E Narihiro
Affiliation:
Dept. of Physics, Osaka Prefecture University, 1-1 Gakuen-Cho, Sakai, Osaka 599-8531, Japan
K Oda
Affiliation:
Dept. of Physics, Osaka Prefecture University, 1-1 Gakuen-Cho, Sakai, Osaka 599-8531, Japan
Shigemitsu Nakanishi
Affiliation:
nakanisi@ms.cias.osakafu-u.ac.jp, Osaka Prefecture University, Physics, Japan
Walter M Gibson
Affiliation:
wgibson@xos.com, XOS, United States
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Abstract

We have been developing a low energy Ne atom scattering system combined with a time-of-flight spectrometer for insulator surface structural analysis. Insulator surface structure is difficult to study because of charging effects during electron or ion beam bombardment. Structural analyses of insulator surfaces are very important in fundamental research as well as technology fields. In our system, charged ion beams of 2 keV-Ne+ are converted into neutral beams by charge exchange with the same element gas after the primary beam passes through a chopper. Other features of this system are pulsed beams, time-of-flight measurements, and a micochannel plate (MCP) detector is coaxially mounted along the primary beam. This is a home made equipment. We will show the detection systems, as well.

Keywords

Neinsulatorion scattering spectroscopy (ISS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 908: Symposium OO – Growth, Modification, and Analysis by Ion Beams at the Nanoscale , 2005 , 0908-OO05-16
Copyright
Copyright © Materials Research Society 2006

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References

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