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Development of high-current ionic liquid ion source toward surface modification

Published online by Cambridge University Press:  09 May 2013

Mitsuaki Takeuchi ,
Takuya Hamaguchi ,
Hiromichi Ryuto  and
Gikan H Takaoka
Mitsuaki Takeuchi
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
Takuya Hamaguchi
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
Hiromichi Ryuto
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
Gikan H Takaoka
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Abstract

Ionic liquid (IL) ion sources with different emitter tip materials and tip numbers were developed and examined on ion beam characteristics with respect to its ILs wettability. As a result of ion current measurements, the most stable emission current was obtained for the graphite emitter tip and the ion current increased with increase of the tip number. The results indicate that the emitter wettability corresponding to the supplying flow rate and the number of emission site play an important role to stabilize and increase the beam current.

Keywords

ion-beam processingion-solid interactionssurface reaction

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Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1575: Symposium VV – Materials Applications of Ionic Liquids , 2013 , mrss13-1575-vv03-08
Copyright
Copyright © Materials Research Society 2013 

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