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Dielectric and Pulsed Spectroscopy of Shear Mode PZT Microactuator

Published online by Cambridge University Press:  17 March 2011

Jürgen Brünahl ,
Alex Grishin  and
Sergey Khartsev
Jürgen Brünahl
Affiliation:
Department of Condensed Matter Physics, Royal Institute of Technology, S-100 44 Stockholm, Sweden
Alex Grishin
Affiliation:
Department of Condensed Matter Physics, Royal Institute of Technology, S-100 44 Stockholm, Sweden
Sergey Khartsev
Affiliation:
Department of Condensed Matter Physics, Royal Institute of Technology, S-100 44 Stockholm, Sweden
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Abstract

Ferroelectric lead zirconate titanate (PZT) is the main industrial product in piezoelectric ceramic materials used for sensor and actuator applications. High precision in manufacturing of microelectromechanical systems is essential to get demanded performance accuracy. An adequate and preferably non-destructive measurement technique is desired to characterize the materials properties at various stages of device fabrication as well as to find correlation between the processing parameters, microstructure and functional properties. We report on a new pulsed technique, which has been employed to characterize all relevant properties of special machined array of PZT channels quickly, reliably and reproducibly: dielectric constant, loss factor tan σ, electromechanical coupling coefficient, resonance frequency and mechanical quality factor Q as well as temperature dependencies of these parameters.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE4.6
Copyright
Copyright © Materials Research Society 2001

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References

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