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The Elastic Moduli of Silver Thin Films Measured with a New Microtensile Tester

Published online by Cambridge University Press:  22 February 2011

J. Ruud ,
D. Josell ,
A. L. Greer  and
F. Spaepen
J. Ruud
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
D. Josell
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
A. L. Greer
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Cambridge CB2 3QZ, U.K.
F. Spaepen
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
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Abstract

A new design for a thin film microtensile tester is presented. The strain is measured directly on the free-standing thin film from the displacement of laser spots diffracted from a thin grating applied to its surface by photolithography. The diffraction grating is two-dimensional, allowing strain measurement both along and transverse to the tensile direction. In principle, both Young's modulus and Poisson's ratio of a thin film can be determined. Ag thin films with strong <111> texture were tested. The measured Young moduli agreed with those measured on bulk crystals, but the measured Poisson ratios were low, most likely due to slight transverse folding of the film that developed during the test.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 239
Copyright
Copyright © Materials Research Society 1992

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References

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