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Electro-Fragmentation Analysis of Dielectric Thin Films on Flexible Polymer Substrates

Published online by Cambridge University Press:  01 February 2011

Albert Pinyol ,
Bastian Meylan ,
Damien Gilliéron ,
Aurélie Mottet ,
Vinodh Mewani ,
Yves Leterrier  and
Jan-Anders E Månson
Albert Pinyol
Affiliation:
albert.pinyol@epfl.ch, Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratoire de Technologie des Composites et Polymères (LTC), Station 12, Lausanne, AL, CH-1015, Switzerland
Bastian Meylan
Affiliation:
bastian-meylan@epfl.ch, Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratoire de Technologie des Composites et Polymères (LTC), Station 12, Lausanne, AL, CH-1015, Switzerland
Damien Gilliéron
Affiliation:
damien.gilliéron@epfl.ch, Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratoire de Technologie des Composites et Polymères (LTC), Station 12, Lausanne, AL, CH-1015, Switzerland
Aurélie Mottet
Affiliation:
aurelie.mottet@epfl.ch, Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratoire de Technologie des Composites et Polymères (LTC), Station 12, Lausanne, AL, CH-1015, Switzerland
Vinodh Mewani
Affiliation:
vinodh.mewani@epfl.ch, Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratoire de Technologie des Composites et Polymères (LTC), Station 12, Lausanne, AL, CH-1015, Switzerland
Yves Leterrier
Affiliation:
yves.leterrier@epfl.ch, Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratoire de Technologie des Composites et Polymères (LTC), Station 12, Lausanne, AL, CH-1015, Switzerland
Jan-Anders E Månson
Affiliation:
jan-anders.manson@epfl.ch, Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratoire de Technologie des Composites et Polymères (LTC), Station 12, Lausanne, AL, CH-1015, Switzerland
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Abstract

A novel electro-fragmentation method was developed as a fast alternative to the time consuming fragmentation test carried out in situ in a microscope, to investigate the failure of dielectric coatings on polymer substrates using an ultrathin conductive layer. Focus was put on SiNx coatings on polyimide substrates. A careful selection of the conductive layer was carried out to avoid artifacts resulting for instance from a change of the residual stress state of the investigated coating. Au layers were found to be too ductile and Al-Ti layers altered the stress state of the nitride, which invalidated their use to probe the failure of the nitride coatings. In contrast, a 20 nm thick graphite layer was found to accurately reproduce the failure of the nitride, which was analyzed in terms of residual strain and cohesive properties of the graphite layer. An electro-fatigue device was built and preliminary results suggest that damage already develops in ultrathin coatings at relatively low strain levels under long-term fatigue loading.

Keywords

thin filmfatiguedisplay
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1030: Symposium G – Large-Area Processing and Patterning for Active Optical and Electronic Devices , 2007 , 1030-G03-12
Copyright
Copyright © Materials Research Society 2008

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References

[1] Crawford, G.P. (Ed.) Flexible Flat Panel Displays, J. Wiley, Chichester (UK) 2005.Google Scholar
[2] Leterrier, Y., Prog. Mater. Sci., 55 (2003) 1.Google Scholar
[3] Rochat, G., Leterrier, Y., Månson, J.-A.E. and Fayet, P., Thin Solid Films, 437 (2003) 204.10.1016/S0040-6090(03)00613-8Google Scholar
[4] Abdallah, A.A., Kozodaev, D., Bouten, P.C.P., Toonder, J.M.J. den, Schubert, U.S., With, G. de, Thin Solid Films, 503 (2006) 167.10.1016/j.tsf.2005.11.106Google Scholar
[5] Leterrier, Y., Mådico, L., Demarco, F., Månson, J.-A.E., Betz, U., Escolà, M.F., Olsson, M. Kharrazi and Atamny, F., Thin Solid Films, 460 (2004) 156.Google Scholar
[6] Cairns, D.C. and Crawford, G.P., Proc. IEEE, 93 (2005) 1451.10.1109/JPROC.2005.851515Google Scholar
[7] Dumont, P., Tornare, G., Leterrier, Y., Månson, J.-A.E., Thin Solid Films, 515 (2007) 7437.10.1016/j.tsf.2006.11.104Google Scholar
[8] Townsend, P.H., Barnett, D.M., Brunner, T.A., J. Appl. Phys., 62 (1987) 4438.Google Scholar
[9] Leterrier, Y., Fischer, C., Médico, L., Demarco, F., Månson, J.-A.E., Bouten, P., DeGoede, J., Nisato, G., Nairn, J.A., Proc. 46th SVC Ann. Conf., San-Francisco, May 3-8 (2003).Google Scholar