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Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators

Published online by Cambridge University Press:  15 February 2011

A. David Johnson ,
J. D. Busch ,
Curtis A. Ray  and
Charles Sloan
A. David Johnson
Affiliation:
TiNi Alloy Company, 1621 Neptune Drive, San Leandro, CA 94577
J. D. Busch
Affiliation:
TiNi Alloy Company, 1621 Neptune Drive, San Leandro, CA 94577
Curtis A. Ray
Affiliation:
Microflow Analytical Inc., 3987 South First Street, Unit K, Livermore CA 94550
Charles Sloan
Affiliation:
Microflow Analytical Inc., 3987 South First Street, Unit K, Livermore CA 94550
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Abstract

Thin film shape memory alloy has been integrated with silicon in a new actuation mechanism for micro-electro-mechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy micro-actuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 151
Copyright
Copyright © Materials Research Society 1992

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References

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