Article contents
Film Synthesis on Powders by Cathodic ARC Plasma Deposition
Published online by Cambridge University Press: 21 February 2011
Abstract
Cathodic arc plasma deposition was used to coat Al2O3 powder (mesh size 60) with platinum. the power particles were moved during deposition using a mechanical system operating at a resonance frequency of 20 Hz. Scanning electron microscopy and auger electron microscopy show that all particles are completely coated with a platinum film having a thickness of about 100 nm. the actual deposition time was only 20 s, thus the deposition rate was very high (5 nm/s).
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1995
References
- 4
- Cited by