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Fracture in Silicon Nitride and Alumina thin Films: a Molecular Dynamics Study
Published online by Cambridge University Press: 10 February 2011
Abstract
Fracture in thin films of silicon nitride and alumina is investigated with large-scale multiresolution molecular-dynamics (MD) simulations on parallel computers. The simulations for alumina include dynamic charge transfer effects based on electronegativity equalization. Results for structural and dynamic correlations and the effects of temperature and orientation of film on fracture dynamics and morphology of fracture surfaces are presented.
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- Research Article
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- Copyright © Materials Research Society 1997
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