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Published online by Cambridge University Press: 03 September 2012
We present a new mask design and implantation scheme, which uses one single ion implantation step of 2 MeV He ions at a dose of 7–1014 to 3–1015 He/cm2 to form channel waveguides in single crystalline KNbO3. The special processing of the photoresist mask enables the formation of channel waveguides with a trapezoidal-shaped cross section, providing for the first time simultaneous confinement of both TE and TM modes in a permanent KNbO3 channel waveguide. 2.6 mW second-harmonic blue light at 441 nm was generated in a 5.8 mm long guide for a fundamental power of approx. 200 mW.