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Insertion effect of the 3-nm-thick Co(Pt) layer on AlN preferred orientation and residual stress in the c-axis textured AlN film

Published online by Cambridge University Press:  19 March 2013

Takashi Harumoto ,
Shinji Muraishi ,
Ji Shi ,
Yoshio Nakamura  and
Takashi Ishiguro
Takashi Harumoto
Affiliation:
Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, 2-12-1-S8-6 O-okayama, Meguro-ku, Tokyo, 152-8552, Japan Department of Materials Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba, 278-8510, Japan
Shinji Muraishi
Affiliation:
Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, 2-12-1-S8-6 O-okayama, Meguro-ku, Tokyo, 152-8552, Japan
Ji Shi
Affiliation:
Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, 2-12-1-S8-6 O-okayama, Meguro-ku, Tokyo, 152-8552, Japan
Yoshio Nakamura
Affiliation:
Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, 2-12-1-S8-6 O-okayama, Meguro-ku, Tokyo, 152-8552, Japan
Takashi Ishiguro
Affiliation:
Department of Materials Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba, 278-8510, Japan
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Abstract

The effect of the continuously inserted 3-nm-thick Co(Pt) layer on the preferred orientation of AlN film is investigated, and highly c-axis textured AlN film has been obtained. According to high resolution transmission electron microscope observations, the preferred orientation of sputter-deposited AlN film is improved from polycrystalline to (001) texture at the interface between AlN and Co(Pt)(111). The texture of AlN films are also examined using an x-ray diffractometer equipped with a two dimensional positive sensitive detector. The x-ray rocking curve full width at half maximum of 002AlN of (001) textured AlN with the Co(Pt) layer is 2.7°, and the residual stress of such specimen is 1.6 GPa in tensile stress.

Keywords

nitridetransmission electron microscopy (TEM)thin film
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1515: Symposium II – Atomic Structure and Chemistry of Domain Interfaces and Grain Boundaries , 2013 , mrsf12-1515-ii13-19
Copyright
Copyright © Materials Research Society 2013

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References

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