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Laser-Stimulated Changing of Micromechanical Properties in the Monocrystalline and Porous Silicon

Published online by Cambridge University Press:  21 February 2011

Volodimir A. Makara ,
Galina V. Vesna ,
Olga V. Rudenko  and
Viktor M. Sizontov
Volodimir A. Makara
Affiliation:
Taras Shevchenko University, Department of Physics, Volodimirska st.64, 252017 Kiev, Ukraine
Galina V. Vesna
Affiliation:
Taras Shevchenko University, Department of Physics, Volodimirska st.64, 252017 Kiev, Ukraine
Olga V. Rudenko
Affiliation:
Taras Shevchenko University, Department of Physics, Volodimirska st.64, 252017 Kiev, Ukraine
Viktor M. Sizontov
Affiliation:
Taras Shevchenko University, Department of Physics, Volodimirska st.64, 252017 Kiev, Ukraine
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Abstract

The optical and mechanical properties of silicon surface subjected to thermal, chemical, electromechanical and laser treatment have been studied. A special electroluminescence spectrum of silicon monocrystal with porous layer obtained by means of selective etching has been given. It was shown that radiating of monocrystal and porous silicon by laser irradiation with the energy of (1÷5)• 105j/m2 (λ=1,06 μm) allowed to change their microplasticity and microhardness by 20 -50%.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 318: Symposium Ca – Interface Control of Electrical, Chemical, and Mechanical Properties , 1993 , 709
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1 Pater, J.R., Impurity clustering effects on dislocation generation in silicon. (Dislocation in Solids, Discussions of the Faradey Society, 1964, N38, p.201–210).CrossRefGoogle Scholar
2 Ravi, K.V., Dislocation sourses in silicon. (Metallurgical Transactions, 1973, V. 4, N3, p.681–689).Google Scholar