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Monolithically Integrated X-Ray Detector Arrays for Computed Tomography
Published online by Cambridge University Press: 10 February 2011
Abstract
The design and performance of a high sensitivity monolithic X-ray detector array fabricated by depositing CdTe photodiodes on CdWO4 scintillators for computed tomography (CT) are presented. CdTe photodiodes offer improved sensitivity due to the better match to the CdWO4 scintillator emission spectrum than the Si photodiodes used in current CT scanners. A CdTe photodiode fabricated on glass mechanically stacked to a CdWO4 scintillator showed 30% improvement in signal strength over Si photodiodes stacked to CdWO4-. Monolithic X-ray detector arrays were fabricated by depositing a CdTe photodiode structure on CdWO4 using close-spaced sublimation technique. Preliminary results on the detector's X-ray response, signalto- noise ratio and the X-ray temporal response show that monolithic CdTe X-ray detectors are suitable for practical CT scanner applications.
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- Copyright © Materials Research Society 1998