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Piezoelectric Shear Mode Inkjet Actuator

Published online by Cambridge University Press:  15 March 2011

Jürgen Brünahl ,
Alex M. Grishin ,
Sergey I. Khartsev  and
Carl Österberg
Jürgen Brünahl
Affiliation:
Division of Condensed Matter Physics, Department of Microelectronics and Information Technology, Royal Institute of Technology, Stockholm - Kista, SE-16440, Sweden
Alex M. Grishin
Affiliation:
Division of Condensed Matter Physics, Department of Microelectronics and Information Technology, Royal Institute of Technology, Stockholm - Kista, SE-16440, Sweden
Sergey I. Khartsev
Affiliation:
Division of Condensed Matter Physics, Department of Microelectronics and Information Technology, Royal Institute of Technology, Stockholm - Kista, SE-16440, Sweden
Carl Österberg
Affiliation:
Division of Condensed Matter Physics, Department of Microelectronics and Information Technology, Royal Institute of Technology, Stockholm - Kista, SE-16440, Sweden Department of Advanced Manufacturing Technologies, XaarJet AB, Järfälla, SE-17526, Sweden
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Abstract

We report on comprehensive characterization of piezoelectric shear mode inkjet actuators micromachined into bulk Pb(Zr0.53Ti0.47)O3 (PZT) ceramics. The paper starts with an overview of different inkjet technologies such as continuous jet and drop-on-demand systems, whereat main attention is turned on piezoelectric systems particularly Xaar-type shear mode inkjet color printheads. They are an example of complex microelectromechanical systems (MEMS) and comprise a ferroelectric array of 128 active ink channels (75νm wide and 360νm deep). Detailed information about manufacturing and principles of operation are given. Several techniques to control manufacturing processes and to characterize properties of the piezoelectric material are described: dielectric spectroscopy to measure dielectric permittivity ε and loss tanσ; ferroelectric hysteresis P-E loop tracing to get remnant polarization Pr and coercive field Ec, and a novel pulsed technique to quantify functional properties of the PZT actuator such as acoustic resonant frequencies and electromechanical coupling factor. Stroboscope technique has been employed to find correlation between the degradation of ink-jet performance and heat/high voltage treatment resulting in ferroelectric fatigue.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B1.4
Copyright
Copyright © Materials Research Society 2002

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