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Study of defects and structural transformations induced by ion irradiation of Y2O3 thin films deposited by Ion Beam Sputtering

Published online by Cambridge University Press:  20 February 2017

Bertrand Lacroix ,
Fabien Paumier ,
Michael Jublot ,
Jérôme Pacaud  and
Rolly J. Gaboriaud
Bertrand Lacroix
Affiliation:
Laboratoire de Physique des Matériaux (PHYMAT) – Université de Poitiers – CNRS, SP2MI, BP 30179, 86962 Futuroscope-Chasseneuil Cedex, FRANCE
Fabien Paumier
Affiliation:
Laboratoire de Physique des Matériaux (PHYMAT) – Université de Poitiers – CNRS, SP2MI, BP 30179, 86962 Futuroscope-Chasseneuil Cedex, FRANCE
Michael Jublot
Affiliation:
CEA LETI MINATEC, 17 rue des Martyrs 38054 Grenoble cedex 9, FRANCE
Jérôme Pacaud
Affiliation:
Laboratoire de Physique des Matériaux (PHYMAT) – Université de Poitiers – CNRS, SP2MI, BP 30179, 86962 Futuroscope-Chasseneuil Cedex, FRANCE
Rolly J. Gaboriaud
Affiliation:
Laboratoire de Physique des Matériaux (PHYMAT) – Université de Poitiers – CNRS, SP2MI, BP 30179, 86962 Futuroscope-Chasseneuil Cedex, FRANCE
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Abstract

Y2O3 thin films deposited by Ion Beam Sputtering (IBS) deposition technique exhibit a particular disordered microstructure. In order to obtain a better knowledge on phase transition mechanisms occurring during irradiation, thin films with different microstructures have been implanted with xenon ions at different energies and different doses. This work established two types of transition (cubic-amorphous or cubic-monoclinic) depending mainly on the ion energy with a possibility to control the damaging kinetic via the pre-existing oxygen disorder.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1122: Symposium O – Structure/Property Relationships in Fluorite-Derivative Compounds , 2008 , 1122-O09-04
Copyright
Copyright © Materials Research Society 2009

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References

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