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A Technique for the Examination of Surface Effects in Aluminum Nitride Ceramics

Published online by Cambridge University Press:  15 February 2011

M. Grant Norton ,
Stuart McKernan  and
C. Barry Carter
M. Grant Norton
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
Stuart McKernan
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
C. Barry Carter
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
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Abstract

A specimen preparation technique for the study of surface reactions and thin-film effects in aluminum nitride ceramic substrates is described. The technique uses specially prepared electron-transparent thin-foil substrates. These substrates can be examined directly in the electron microscope without the need for any further specimen preparation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 225: Symposium G – Materials Reliability Issues in Microelectronics , 1991 , 349
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

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