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Theoretical Considerations on Growing Uniformly Thick Films of Perfect Crystallinity
Published online by Cambridge University Press: 15 February 2011
Abstract
Theoretical considerations that facilitate the design of procedures to grow epilayers of uniform thickness and perfect crystallinity are briefly reviewed. The attainment of uniformity and crystallinity are respectively best served by growing in the monolayer-by-monolayer mode and below a critical thickness. Equilibrium and non-equilibrium criteria developed to accomplish these goals are briefly dealt with.
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- Copyright © Materials Research Society 1993
References
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