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Undoped and Doped Perovskite Films: Sol-Gel Processing and Characterization

Published online by Cambridge University Press:  25 February 2011

Mareike Klee  and
Rainer Waser
Mareike Klee
Affiliation:
Philips GmbH Forschungslaboratium Aachen, Weiβhausstr., D-5100 Aachen, Germany
Rainer Waser
Affiliation:
Philips GmbH Forschungslaboratium Aachen, Weiβhausstr., D-5100 Aachen, Germany
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Abstract

Thin undoped Pb(ZrxTi1−x)O3 (x=0.2-0.75), BaTiO3, SrTiO3 as well as acceptor (Mn, Ni) and donor (La, Ce) doped films with thicknesses of 0.2-1 μm have been deposited by a modified sol-gel process. The crystal structure and the morphology of the films as a function of the processing and composition were analyzed. The films were characterized with respect to their ferroelectric and dielectric properities e.g. permittivity, remanent polarization, coervice field strength, insulation resistance.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 437
Copyright
Copyright © Materials Research Society 1992

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