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Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles

Published online by Cambridge University Press:  01 February 2011

Trudo H. Clarysse ,
Alain Moussa ,
Frederik Leys ,
Roger Loo ,
Wilfried Vandervorst ,
Mark C. Benjamin ,
Robert J. Hillard ,
Vladimir N. Faifer ,
Michael I. Current  and
Rong Lin
...Show all authors
Trudo H. Clarysse
Affiliation:
trudo.clarysse@imec.be, IMEC, SPDT/MCA, Kapeldreef 75, Leuven, N/A, B-3001, Belgium, +32 16 281480, +32 16 281 576
Alain Moussa
Affiliation:
alain.moussa@imec.be, IMEC, Kapeldreef 75, Leuven, N/A, B-3001, Belgium
Frederik Leys
Affiliation:
frederik.leys@imec.be, IMEC, Kapeldreef 75, Leuven, N/A, B-3001, Belgium
Roger Loo
Affiliation:
roger.loo@imec.be, IMEC, Kapeldreef 75, Leuven, N/A, B-3001, Belgium
Wilfried Vandervorst
Affiliation:
wilfried.vandervorst@imec.be, IMEC, Kapeldreef 75, Leuven, N/A, B-3001, Belgium
Mark C. Benjamin
Affiliation:
Mbenjamin@ssm-inc.com, Solid State Measurements, Inc., 110 Technology Drive, Pittsburgh, PA, 15275, United States
Robert J. Hillard
Affiliation:
rhillard@ssm-inc.com, Solid State Measurements, Inc., 110 Technology Drive, Pittsburgh, PA, 15275, United States
Vladimir N. Faifer
Affiliation:
v_n_faifer@yahoo.com, Frontier Semiconductor, Inc., 1631 North First Street, San Jose, CA, 95112, United States
Michael I. Current
Affiliation:
currentsci@aol.com, Frontier Semiconductor, Inc., 1631 North First Street, San Jose, CA, 95112, United States
Rong Lin
Affiliation:
RL@capres.com, Capres A/S, Scion DTU, Building 373, Kgs Lyngby, N/A, DK-2800, Denmark
Dirch H. Petersen
Affiliation:
DP@capres.com, Capres A/S, Scion DTU, Building 373, Kgs Lyngby, N/A, DK-2800, Denmark
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Abstract

Comparison of state-of-the-art zero-penetration sheet resistance tools on ultra-shallow Boron CVD layers on top of a medium doped As layer.

Keywords

activation analysischemical vapor deposition (CVD) (deposition)dopant
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 912: Symposium C – Doping Engineering for Device Fabrication , 2006 , 0912-C05-07
Copyright
Copyright © Materials Research Society 2006

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References

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