Hostname: page-component-745bb68f8f-grxwn Total loading time: 0 Render date: 2025-02-05T21:32:09.648Z Has data issue: false hasContentIssue false
  • English
  • Français

Adsorption of Silicon Tetrachloride on Si(111) 7×7

Published online by Cambridge University Press:  25 February 2011

P. Gupta ,
P. A. Coon ,
B. G. Koehler  and
S. M. George
P. Gupta
Affiliation:
Dept. of Chemistry, Stanford University, Stanford, Calif. 94305
P. A. Coon
Affiliation:
Dept. of Chemistry, Stanford University, Stanford, Calif. 94305
B. G. Koehler
Affiliation:
Dept. of Chemistry, Stanford University, Stanford, Calif. 94305
S. M. George
Affiliation:
Dept. of Chemistry, Stanford University, Stanford, Calif. 94305
Get access

Abstract

The kinetics of SiCl4 adsorption on Si(lll) 7×7 were studied using laser induced thermal desorption (LITD) and temperature programmed desorption (TPD) techniques. The initial reactive sticking coefficient of SiCl4 on Si(lll) 7×7 was observed to decrease with increasing surface temperature. This decrease was consistent with a precursor-mediated adsorption model. Both LITD and TPD experiments monitored SiCl2 as the main desorption product. These results suggest that SiC12 may be the stable chlorine species on the Si(lll) 7×7 surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 131: Symposium E – Chemical Perspectives of Microelectronic Materials I , 1988 , 197
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Koehler, B.G., Mak, C.H., Arthur, D.A, Coon, P.A. and George, S.M., J. Chem. Phys. 89, 1709 (1988).CrossRefGoogle Scholar
2. George, S.M., Desantolo, A.M. and Hall, R.B. Surf. Sci., 159, L425 (1985).CrossRefGoogle Scholar
3. Brand, J.L. and George, S.M., Surf. Sci. 167, 341 (1986).CrossRefGoogle Scholar
4. Florio, J.V. and Robertson, W.D., Surf. Sci. 18, 398 (1969).CrossRefGoogle Scholar
5. d'Evelyn, M.P., Nelson, M.M. and Engel, T., Surf. Sci. 186, 75 (1986).CrossRefGoogle Scholar
6. George, S.M., Gupta, P., Mak, C.H., Coon, P.A., (this journal).Google Scholar
7. Weinberg, W.H. in Kinetics of Interface Reactions. ed. by Grunze, M. and Kreuzer, H. (Springer Verlag NY 1987) p 94.CrossRefGoogle Scholar