Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-10T09:59:25.720Z Has data issue: false hasContentIssue false
  • English
  • Français

Amorphization Mechanisms in AlxGa1-xAs

Published online by Cambridge University Press:  15 February 2011

B. W. Lagow ,
B. A. Turkot ,
I. M. Robertson ,
L. E. Rehn ,
P. M. Baldo ,
S. D. Roh ,
D. V. Forbes  and
J. J. Coleman
B. W. Lagow
Affiliation:
Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana IL 61801, b-lagow@uiuc.edu
B. A. Turkot
Affiliation:
Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana IL 61801, b-lagow@uiuc.edu
I. M. Robertson
Affiliation:
Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana IL 61801, b-lagow@uiuc.edu
L. E. Rehn
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne IL 60332
P. M. Baldo
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne IL 60332
S. D. Roh
Affiliation:
Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana IL 61801, b-lagow@uiuc.edu
D. V. Forbes
Affiliation:
Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana IL 61801, b-lagow@uiuc.edu
J. J. Coleman
Affiliation:
Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana IL 61801, b-lagow@uiuc.edu
Get access

Abstract

Bulk ion implantations of AlxGa1-xAs (x = 0.6 or 0.85) were performed at 77 K with 1.5 MeV Kr+, 1 MeV Ar+ or 1.5 MeV++ ions, and the resulting damage state examined by using Rutherford backscattering spectrometry-channeling at 77 K and 293 K and transmission electron microscopy at 300 K. Amorphization of a portion of the AlxGa1-x As layer occurred at 77 K only for the 1.5 MeV Kr+ implantation, although the dose required to cause amorphization was higher for the higher Al content alloy. TRIM calculations[10–11 ] show that with this implantation the density of high energy density cascades varies as a function of depth through the layer and that these are superimposed on a high, uniform density of defects. Comparison of the ion channeling spectra at 77 K and 293 K shows that recovery occurs over a portion of the layer in the Al0.6Ga0.4As but is not detected in the Al0.85Ga0.15As layer. In both alloys, the room temperature microstructure consists of an amorphous and a crystalline region. The amorphous region extends from the deeper AlxGa1-xAs/GaAs interface into the layer, and is separated from the crystalline material by a crystalline region containing planar defects. The difference between the alloys is in the extent of this latter region, which decreases in width with increasing Al content. These results will be used to examine current models for amorphization in the AlxGa1-xAs system.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 439: Symposium B – Microstructure Evolution During Irradiation , 1996 , 197
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Cullis, A. G., Jacobson, D. C., Poate, J. M., Chew, N. G., Whitehouse, C. R. and Pearton, S. J., in Advances in Materials, Processing, and Devices in III- V Compound Semiconductors, edited by Sadana, D. K., Eastman, L. F., and Dupuis, R. (Mat. Res. Soc. Symp. Proc. 144, Pittsburgh, PA 1989), p. 361.Google Scholar
2. Cullis, A. G., Smith, P. W., Jacobson, D. C., and Poate, J. M., J. Appl. Phys. 69, p. 1279 (1991).Google Scholar
3. Eaglesham, D. J., Poate, J. M., Jacobson, D. C., Cerullo, M., Pfeiffer, L. N., and West, K., Appl. Phys. Lett. 58, p. 523 (1991).Google Scholar
4. Jencic, I., Bench, M. W., Robertson, I. M. and Kirk, M. A., J. Appl. Phys. 69, p. 1287 (1991).Google Scholar
5. Klatt, J. L., Alwan, J., Coleman, J. J., and Averback, R. S., in Phase Transformation and Modification by Beam-Solid Interactions, edited by Was, G. S., Rehn, L. E., Follstaedt, D. M., (Mat. Res. Soc. Symp. Proc. 235, Pittsburgh, PA 1992), p. 235.Google Scholar
6. Tan, H. H., Jagadish, C., Williams, J. S., Zou, J., and Cockayne, D. J. H., J. Appl. Phys. 80, p. 2691 (1996).Google Scholar
7. Turkot, B. A., Lagow, B. W., Robertson, I. M., Forbes, D. V., Coleman, J. J., Rehn, L. E., and Baldo, P. M., J. Appl. Phys. 80, p. 4366 (1996).Google Scholar
8. Miller, L. M. and Coleman, J. J., CRC Crit. Rev. Solid State Mater. Sci. 15, p. 1 (1988).Google Scholar
9. Taylor, A., Allen, C. W., and Ryan, E. A., Nucl. Instr. Meth. B24/25, p. 598 (1987).Google Scholar
10. Turkot, B. A., Ph.D. Thesis, University of Illinois at Urbana-Champaign, 1995.Google Scholar
1 1. Turkot, B. A., Robertson, I. M., Rehn, L. E., Baldo, P. M., Forbes, D. V., and Coleman, J. J., submitted to J. Appl. Phys.Google Scholar