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Amorphous Hydrogenated Silicon P-I-N Solar Cells Grown from Hydrogen-Diluted Silane

Published online by Cambridge University Press:  25 February 2011

Murray S Bennett  and
Jacob C Tu
Murray S Bennett
Affiliation:
Solarex Corporation Thin Film Division 826 Newtown-Yardley Rd Newtown, PA 18960
Jacob C Tu
Affiliation:
Solarex Corporation Thin Film Division 826 Newtown-Yardley Rd Newtown, PA 18960
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Abstract

We investigated p-i-n solar cells in which the i-layer was grown from hydrogen-diluted silane. The deposition parameters which were varied include flow rates, deposition pressure and power, and the degree of hydrogen dilution. We found that high quality devices could be made in which the i-layer was grown under a wide range of deposition conditions but that over this range neither the initial performance nor the stability of the devices differed significantly from those of cells having the same structure, but in which the i-layer was deposited from SiH4 with no H2-dilution.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 192: Symposium O – Amorphous Silicon Technology - 1990 , 1990 , 45
Copyright
Copyright © Materials Research Society 1990

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References

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