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An Alternative Non-contact Planarization Technique by Utilizing the Electrokinetic Phenomenon

Published online by Cambridge University Press:  01 February 2011

David Butler ,
Cheng Seng Leo ,
Sum Huan Ng  and
Steven Danyluk
David Butler
Affiliation:
LEOC0001@ntu.edu.sg, Nanyang Technological University, Singapore, Singapore
Cheng Seng Leo
Affiliation:
shng@simtech.a-star.edu.sg, Singapore Institute of Manufacturing Technology, Singapore, Singapore
Sum Huan Ng
Affiliation:
mdlbutler@ntu.edu.sg, Nanyang Technological University, School of Mechanical & Aerospace Engineering, 50 Nanyang Avenue, Singapore, 639798, Singapore
Steven Danyluk
Affiliation:
steven.danyluk@marc.gatech.edu, Georgia Institute of Technology, Singapore, Singapore
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Abstract

In this paper, the authors introduce and present some findings on an alternative non-contact material removal technique. Material removal is made possible by utilizing the electrokinetic and hydrodynamic effects of suspended particles to manipulate their trajectories to impact onto the surface of the workpiece. The research was previously demonstrated and reported where the removal rate can be precisely controlled by varying the electrical field and the flow rate of the slurry across the surface of the workpiece. New findings are reported on the application of the technique to different materials that will highlight the attractiveness of this alternative approach to producing surfaces with roughness in the order of nanometres.

Keywords

nanoscalemachiningslurry
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1249: Symposia E/F – Advanced Interconnects and Chemical Mechanical Planarization for Micro-and Nanoelectronics , 2010 , 1249-E05-03
Copyright
Copyright © Materials Research Society 2010

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