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An Ion Probe Study of Plasma-Assisted Laser Deposition
Published online by Cambridge University Press: 01 January 1992
Abstract
The ionic content of an excimer laser ablated Yga2Cu3O7−δ (YBCO) plume has been investigated by using an ion probe detection system. The time-of-flight ion signals indicate a bifurcation of the plume, where the degree of bifurcation is dependent on both the oxygen pressure and the laser spot size at the target. A significant enhancement in the ionic content is observed when the plume is passed through a high voltage discharging ring. The results describing the effect of the pressure, laser spot size and the discharge parameters on the propagating laser plume are presented in this paper.
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- Research Article
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- Copyright © Materials Research Society 1993
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