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An Optical Diffraction Microphone with Active Grating Diaphragm

Published online by Cambridge University Press:  01 February 2011

Kazuhiro Suzuki ,
Hideyuki Funaki  and
Yujiro Naruse
Kazuhiro Suzuki
Affiliation:
Corporate Research & Development Center, Toshiba Corporation 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
Hideyuki Funaki
Affiliation:
Corporate Research & Development Center, Toshiba Corporation 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
Yujiro Naruse
Affiliation:
Corporate Research & Development Center, Toshiba Corporation 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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Abstract

We present a new conceptual active optical microphone based on complementary metal-oxide semiconductor (CMOS) - micro electro mechanical systems (MEMS) micromachining techniques. The diaphragm of the microphone has a diffracting grating fabricated by the CMOS process with only a small number of post-processes. The active microphone actuates the diaphragm on an arbitrary frequency by electrostatic force, and detects sound waves by the light waves. From the verification experiment result, this active microphone was able to perform advanced functions, such as the amplifier effect and the detection of phase information of sound waves.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 872: Symposium J – Micro- and Nanosystems—Materials and Devices , 2005 , J13.11
Copyright
Copyright © Materials Research Society 2005

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References

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