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Analysis of Crystal Nucleation and Growth in Amorphous CobaltDisilicede.
Published online by Cambridge University Press: 15 February 2011
Abstract
Extensive in situ investigations of the crystallization ofamorphous cobalt disilicide have been conducted using a transmissionelectron microscope with a hot stage. Thermodynamic and kinetic parametersdescribing the heterogeneous transformation have been evaluated. The angleof contact betwen crystalline and amorphous material was determined fromtilting experiments to be 76°. Nucleation rates in samples 40 nm thick wereevaluated at various temperatures and compared with thermodynamic models todeduce an interfacial energy between amorphous and crystalline COSi2 (σca) of 121 mJ/m2 and anactivation energy for crystallization of 1.27 eV. Johnson-Mehl-Avramianalysis of the observed continuous nucleation and steady state isotropiegrowth in 100 nm thick samples points to a gradual transition of thecrystallization mode from 3-dimensional (n=4) to 2-dimensional (n=3) growthas might be expected. Comparison of the nucleation and growth rates in 40 nmand 100 nm thick samples demonstrated the influence of surfaces oncrystallization phenomena in thin films.
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- Copyright © Materials Research Society 1994
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