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Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections

Published online by Cambridge University Press:  17 March 2011

Edward S. Kolesar ,
Peter B. Allen ,
Noah C. Boydston ,
Jeffery T. Howard ,
Simon Y. Ko ,
Matthew D. Ruff ,
Josh M. Wilken  and
Richard J. Wilks
Edward S. Kolesar
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
Peter B. Allen
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
Noah C. Boydston
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
Jeffery T. Howard
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
Simon Y. Ko
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
Matthew D. Ruff
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
Josh M. Wilken
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
Richard J. Wilks
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
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Abstract

This research focuses on the design and experimental characterization of two types of asym- metrical MEMS electrothermal microactuators. Both MEMS polysilicon electrothermal microac- tuator designs use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements as a function of applied electrical power are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE5.34
Copyright
Copyright © Materials Research Society 2001

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References

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