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Atomic Force Microscope Chemically Induced Direct Processing

Published online by Cambridge University Press:  10 February 2011

B. N. Shimbo ,
S. Komarov ,
B. J. Vartanian ,
Y. Okada  and
J. S. Harris Jr.
B. N. Shimbo
Affiliation:
Solid State Laboratory, Stanford University, Stanford, CA 94305
S. Komarov
Affiliation:
Solid State Laboratory, Stanford University, Stanford, CA 94305
B. J. Vartanian
Affiliation:
Solid State Laboratory, Stanford University, Stanford, CA 94305
Y. Okada
Affiliation:
Solid State Laboratory, Stanford University, Stanford, CA 94305
J. S. Harris Jr.
Affiliation:
Solid State Laboratory, Stanford University, Stanford, CA 94305
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Abstract

Interest in room-temperature operable quantum effect devices has created a need for simple and inexpensive nanofabrication techniques. By applying a bias to a conductive AFM tip, we have succeeded in fabricating narrow (˜30 nm) oxide lines on a variety of metal and III-V semiconductor substrates. The effects of different drawing parameters such as tip bias, translation speed, ambient atmosphere, and substrate doping on line quality were explored.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 421: Symposium D – Compound Semiconductor Electronics and Photonics , 1996 , 299
Copyright
Copyright © Materials Research Society 1996

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References

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