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Auger and EELS Study of a-Si1−x Cx:H Alloys

Published online by Cambridge University Press:  21 February 2011

M.De Seta ,
P. Narducci  and
F. Evangelisti
M.De Seta
Affiliation:
Dipartimento di Fisica, Universita “La Sapienza”, Piazzale Aldo Moro 2, 1–00185, Roma, Italy
P. Narducci
Affiliation:
Dipartimento di Fisica, Universita “La Sapienza”, Piazzale Aldo Moro 2, 1–00185, Roma, Italy
F. Evangelisti
Affiliation:
Dipartimento di Fisica, Universita “La Sapienza”, Piazzale Aldo Moro 2, 1–00185, Roma, Italy
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Abstract

It is shown that Auger and electron energy loss spectroscopies can provide a well defined picture of the local bonding and structure of a-Si1−x Cx:H alloys. The samples were found macroscopically homogeneous but microscopically heterogeneous on a scale of few Angstroms. A simple model where the tetrahedral network is chemically ordered at low x values and carbon tends to segregate in C-C microclusters at high x values seems to reproduce the data very well. By fitting the C and Si Auger spectra it was possible to have a quantitative determination of the percentage of different configurations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 219: Symposium A – Amorphous Silicon Technology - 1991 , 1991 , 265
Copyright
Copyright © Materials Research Society 1991

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References

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