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Automatic Iterative Fitting of RBS Spectra From Multielement Samples

Published online by Cambridge University Press:  26 February 2011

James Eridon  and
Gary Was
James Eridon
Affiliation:
University of Michigan, Department of Nuclear Engineering, Ann Arbor, Michigan 48109
Gary Was
Affiliation:
University of Michigan, Department of Nuclear Engineering, Ann Arbor, Michigan 48109
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Abstract

A computer code (BASF) has been constructed to perform automatic iterative fitting of smoothed Rutherford Backscattering Spectra using only the experimental spectrum and the parameter set defining the experiment. The code may be used to analyze anywhere from two to five elements. The code output consists of the total amount of each element present and a composition versus depth profile.

The code's performance was verified experimental backscattering spectra. Samples consisting of nickel substrates onto which layers of nickel and aluminum have been alternately evaporated were used to produce backscattering spectra. These spectra, when analyzed, demonstrated that the code was able to determine the total aluminum content to within 5% and the ratio of aluminum to nickel within 1% of the thickness monitor readings taken during evaporation. The code has also shown the ability to recognize sharp interfaces in well resolved spectra. The ultimate limits on the code's accuracy are the resolution of the spectrum and the accuracy of the computed stopping powers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 54: Symposium E – Thin Films–Interfaces and Phenomena , 1985 , 693
Copyright
Copyright © Materials Research Society 1986

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References

REFERENCES

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