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Buffer Gas Effects on the Ablation Rates of Copper Using a Pico-Second Pulsed Nd:YAG Laser

Published online by Cambridge University Press:  01 January 1992

X.L. Mao ,
W.T. Chan  and
R.E. Russo
X.L. Mao
Affiliation:
Lawrence Berkeley Laboratory, 1 Cyclotron Road, Berkeley, CA 94720
W.T. Chan
Affiliation:
Lawrence Berkeley Laboratory, 1 Cyclotron Road, Berkeley, CA 94720
R.E. Russo
Affiliation:
Lawrence Berkeley Laboratory, 1 Cyclotron Road, Berkeley, CA 94720
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Abstract

Copper samples were ablated by a pico-second pulsed Nd:YAG laser in Ar and He gases under different pressures. At 1064 nm, the change of ablation rate of copper in He gas from lx10−5 to 760 torr is smaller than that in Ar gas. A model for the development of a plasma above the target surface is presented based on inverse Bremsstrahlung absorption between fast electrons and the gas medium. Ionization rate of the buffer gas versus pressure was estimated using the model, and a good correlation was found with the ablation rate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 187
Copyright
Copyright © Materials Research Society 1993

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References

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