Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-13T02:14:26.203Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization and Performance of Carbon Films Deposited by Plasma and Ion Beam Based Techniques

Published online by Cambridge University Press:  21 February 2011

K.C. Walter ,
H. Kung ,
T. Levine ,
J.T. Tesmer ,
P. Kodali ,
B.P. Wood ,
D.J. Rej ,
M. Nastasi ,
J. Koskinen  and
J-P. Hirvonen
K.C. Walter
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM 87545
H. Kung
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM 87545
T. Levine
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM 87545
J.T. Tesmer
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM 87545
P. Kodali
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM 87545
B.P. Wood
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM 87545
D.J. Rej
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM 87545
M. Nastasi
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM 87545
J. Koskinen
Affiliation:
VTT Manufacturing Technology, Materials Technology, P.O. Box 1703, FIN-02044 VTT, Finland
J-P. Hirvonen
Affiliation:
VTT Manufacturing Technology, Materials Technology, P.O. Box 1703, FIN-02044 VTT, Finland
Get access

Abstract

Plasma and ion beam based techniques have been used to deposit carbon-based films. The ion beam based method, a cathodic arc process, used a magnetically mass analyzed beam and is inherently a line-of-sight process. Two hydrocarbon plasma-based, non-line-of-sight techniques were also used and have the advantage of being capable of coating complicated geometries. The self-bias technique can produce hard carbon films, but is dependent on rf power and the surface area of the target. The pulsed-bias technique can also produce hard carbon films but has the additional advantage of being independent of rf power and target surface area. Tribological results indicated the coefficient of friction is nearly the same for carbon films from each deposition process, but the wear rate of the cathodic arc film was five times less than for the self-bias or pulsed-bias films. Although the cathodic arc film was the hardest, contained the highest fraction of sp3 bonds and exhibited the lowest wear rate, the cathodic arc film also produced the highest wear on the 440C stainless steel counterface during tribological testing. Thus, for tribological applications requiring low wear rates for both counterfaces, coating one surface with a very hard, wear resistant film may detrimentally affect the tribological behavior of the counterface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 87
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Schmellenmeier, H., Z. Phys. Chem. 205, 349 (1955/1956).Google Scholar
2 Aisenberg, S., R. Chabot, J. Appl. Phys. 42, 2953 (1971).Google Scholar
3 Robertson, J., Prog. Solid St. Chem. 21, 199 (1991).Google Scholar
4 Holmberg, K., Matthews, A., Coatings Tribology: Properties. Techniques and Applications in Surface Engineering, edited by Dowson, D., (Elsevier, Amstersdam, 1994), pg. 214–215.Google Scholar
5 Robertson, J., NATO ASI Series B, 266, 331 (1991).Google Scholar
6 Angus, J.C., Koidl, P. and Domitz, , in Plasma Deposited Thin Films, edited by Mort, J., Jansen, F., (CRC Press, Boca Raton, Florida, 1986), p. 89.Google Scholar
7 Geis, M.W. and Tamor, M. A., in Encyclopedia of Applied Physics. Vol. 5, edited by Trigg, G.L., (VCH Publishers, Inc, New York, 1991), p. 1.Google Scholar
8 Catherine, Y., NATO ASI Series B, 266, 193 (1991).Google Scholar
9 Hirvonen, J-P., Lappalainen, R., Koskinen, J., Antilla, A., Jervis, T.R., Trkula, M., J. Mater. Res. 5, 2524 (1990).Google Scholar
10 Enke, K., Dimigen, H., Hübsch, H., Appl. Phys. Lett. 36, 291 (1980).Google Scholar
11 Wei, U.R., Wilbur, P.J., Erdemir, A., Kustas, F.M., Surf. Coat. Technol. 51,139 (1992).Google Scholar
12 Oguri, K., Arai, T., J. Mater. Res. 7, 1313 (1992).Google Scholar
13 Wu, R.L.C., Surf. Coat. Technol. 57, 258 (1992).Google Scholar
14 Itoh, Y., Hibi, S., Hioki, T., Kawamoto, J., J. Mater. Res. 6, 871 (1991).Google Scholar
15 André, B., Nabot, J-Ph., Lombard, L., Martin, P., NATO ASI Series E, 266, 313 (1991).Google Scholar
16 Grill, A., Patel, V., Meyerson, B.S., NATO ASI Series E, 266, 417 (1991).Google Scholar
17 Antilla, A., in Structure-Property Relationships in Surface-Modified Ceramics, edited by McHargue, C.J., Kossowsky, R.,Hofer, W.O., (Kluwer Academic Publishers, 1989), p. 455.Google Scholar
18 Chen, J., Conrad, J.R. and Dodd, R.A., Journal of Materials Engineering and Performance 2, 839(1993).Google Scholar
19 Holmberg, K., Koskinen, J., Ronkainen, H., Vihersalo, J., Hirvonen, J-P. and Likonen, J., accepted for publication in Diamond Films and Technology, 1994.Google Scholar
20 Hirvonen, J-P., Koskinen, J., Lappalainen, R. and Antilla, A., Materials Science Forum 52/53, 197 (1989).Google Scholar
21 Handbook of Modern Ion Beam Materials Analysis, edited Tesmer, J.T. and Nastasi, M., (to be published by the Materials Research Society, 1995).Google Scholar
22 Doolittle, L.R., Nucl. Instr. Meth. B9, 334 (1985).Google Scholar
23 Nano Instruments, Inc., Knoxville, TN.Google Scholar
24 Holmberg, K., Matthews, A., Coatings Tribology: Properties. Techniques and Applications in Surface Engineering, edited by Dowson, D., (Elsevier, Amstersdam, 1994), p. 53.Google Scholar
25 Berger, S.D. and McKenzie, D.R., Phil. Mag. Lett. 57, 265 (1988).Google Scholar
26 Lifshitz, Y., Kasi, S.R., and Rabalais, J.W., Phys. Rev. B41, 10468 (1991).Google Scholar
27 Bhushan, B., Gupta, B.K., Handbook of Tribology: Materials. Coatings, and Surface Treatments. (McGraw-Hill, New York, 1991), p. 3.30.Google Scholar