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Characterization of Pulsed Laser Deposited Zinc Oxide

Published online by Cambridge University Press:  15 February 2011

N. J. Ianno ,
L. McConville  and
N. Shaikh
N. J. Ianno
Affiliation:
Center for Microelectronic and Optical Materials Research, Dept. of Elec. Eng.
L. McConville
Affiliation:
Center for Microelectronic and Optical Materials Research, Dept. of Elec. Eng.
N. Shaikh
Affiliation:
Dept. of Eng. Mech., University of Nebraska, Lincoln, Lincoln, NE 68588
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Abstract

The pulsed laser deposition of zinc oxide films (ZnO) has been studied as a function of laser wavelength, and substrate temperature. The deposited films were characterized by x-ray diffractometry, Auger electron spectroscopy, and scanning electron microscopy. Highly textured (002) ZnO films have been deposited at substrate temperatures of 300 C with laser wavelengths of 532 nm and 248 nm. However, the energy fluence of 248 nm radiation controls the degree of texturing, allowing highly textured films to be deposited at room temperature.

Smart structures based on embedded, textured ZnO coated fibers, and wires exhibit excellent piezoelectric response to external stress.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 59
Copyright
Copyright © Materials Research Society 1992

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References

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