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Comparison of Microwave Dielectric Properties of between (001) and (011) Ferroelectric Ba1-xSrxTiO3 Thin Films grown by Pulsed Laser Deposition

Published online by Cambridge University Press:  01 February 2011

Seung Eon Moon ,
Eun-Kyoung Kim ,
Su-Jae Lee ,
Seok-Kil Han ,
Kwang-Yong Kang  and
Won-Jeong Kim
Seung Eon Moon
Affiliation:
Wireless Communication Devices Department, Electronics and Telecommunications Research Institute, Taejon, 305-350, Korea.
Eun-Kyoung Kim
Affiliation:
Wireless Communication Devices Department, Electronics and Telecommunications Research Institute, Taejon, 305-350, Korea.
Su-Jae Lee
Affiliation:
Wireless Communication Devices Department, Electronics and Telecommunications Research Institute, Taejon, 305-350, Korea.
Seok-Kil Han
Affiliation:
Wireless Communication Devices Department, Electronics and Telecommunications Research Institute, Taejon, 305-350, Korea.
Kwang-Yong Kang
Affiliation:
Wireless Communication Devices Department, Electronics and Telecommunications Research Institute, Taejon, 305-350, Korea.
Won-Jeong Kim
Affiliation:
Wireless Communication Devices Department, Electronics and Telecommunications Research Institute, Taejon, 305-350, Korea.
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Abstract

The effects of anisotropic dielectric properties of ferroelectric Ba1-xSrxTiO3 (BST) films on the characteristics of phase shifter have been studied in microwave regions at room temperature. Ferroelectric BST films with (001) and (011) orientation were epitaxially grown on (001) and (011) MgO substrates, respectively, by pulsed laser deposition method. The structures of BST films were investigated using x-ray diffraction measurement. The microwave properties of orientation engineered BST films were investigated using coplanar waveguide transmission lines that were fabricated on BST films using a thick metal layer by photolithography and etching process. The measured differential phase shift and insertion loss (S21) for (011) BST films are larger than those for (001) BST films. Dielectric constants of the ferroelectric BST films are calculated from the measured S21 using a modified conformal-mapping model.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 720: Symposium H – Materials Issues for Tunable RF and Microwave Devices III , 2002 , H3.9
Copyright
Copyright © Materials Research Society 2002

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