Hostname: page-component-cd9895bd7-mkpzs Total loading time: 0 Render date: 2024-12-29T06:45:56.569Z Has data issue: false hasContentIssue false
  • English
  • Français

Confocal optoelectronic holography microscope for materials and structural characterization of MEMS

Published online by Cambridge University Press:  11 February 2011

Cosme Furlong ,
Adam M. Siegel  and
Ryszard J. Pryputniewicz
Cosme Furlong
Affiliation:
NEST – NanoEngineering, Science, and Technology, CHSLT – Center for Holographic Studies and Laser micro-mechaTronics, Mechanical Engineering Department, Worcester Polytechnic Institute, Worcester, MA 01609, U.S.A.
Adam M. Siegel
Affiliation:
NEST – NanoEngineering, Science, and Technology, CHSLT – Center for Holographic Studies and Laser micro-mechaTronics, Mechanical Engineering Department, Worcester Polytechnic Institute, Worcester, MA 01609, U.S.A.
Ryszard J. Pryputniewicz
Affiliation:
NEST – NanoEngineering, Science, and Technology, CHSLT – Center for Holographic Studies and Laser micro-mechaTronics, Mechanical Engineering Department, Worcester Polytechnic Institute, Worcester, MA 01609, U.S.A.
Get access

Abstract

In this paper, we describe confocal optoelectronic holography microscopy (COEHM) technique specifically being developed for characterizing the shape of MEMS and microelectronics. This is particularly important because shape is directly related to the functionality, performance, and integrity of the microstructures of interest. A specific feature of COEHM is that it allows characterization of high aspect ratio MEMS and microelectronics. Representative applications demonstrating the capabilities of COEHM are presented. It is shown that measurement resolution is highly dependent on the numerical aperture (NA) of the optical components comprising COEHM and on the quality of image digitization. By utilizing optical components characterized by a magnification factor of 50x and a NA of 0.45, measurement resolution of 25 nm is achieved. The resolution is increased to 8 nm when utilizing optical components characterized by a magnification factor of 100x and a NA of 0.73.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 738: Symposium G – Spatially Resolved Characterization of Local Phenomena in Materials and Nanostructures , 2002 , G12.4
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Kovacs, G. T. A., Micromachined transducers sourcebook, McGraw-Hill, New York, 1998.Google Scholar
2. Hsu, T-R., MEMS & microsystems: design and manufacture, McGraw-Hill, New York, 2002.Google Scholar
3. Elwenspoek, M. and Wiegerink, R., Mechanical microsensors, Springer-Verlag, New York, 2001.Google Scholar
4. Furlong, C. and Pryputniewicz, R. J., Proc. SPIE, 4778: 1–10, 2002.Google Scholar
5. Pryputniewicz, R. J., Marinis, T. F., Hanson, D. S., and Furlong, C., ASME Paper No. IMECE 2001/MEMS-23906, 2001.Google Scholar
6. Lin, J. E., Sharma, V., Michael, F. S. J., and Kirk, A. G., J. Microlith., Microfab., and Microsyst., 1: 70–77, 2002.Google Scholar
7. Furlong, C. and Pryputniewicz, R. J., ASME Paper No. IMECE 2002/EPP-34502, 2002.Google Scholar
8. Zygo, K3 real-time confocal module, Zygo Corporation, Middlefield, CT, 2001.Google Scholar
9. Sheppard, C. J. R., in Fluorescent and luminescent probes for biological activity, edited by Mason, W. T., Academic Press, London, 1993.Google Scholar
10. Wilson, T., Confocal microscopy, Academic Press, London, 1990.Google Scholar
11. Tiziani, H. J., Achi, R., Krämer, R. N., and Wiegers, L., Appl. Opt., 35: 120–125, 1996.Google Scholar
12. Garcia, E. J. and Sniegowski, J. J., Sensors and Actuators A, 48: 203–214, 1995.Google Scholar
13. Pryputniewicz, E. J., ACES approach to the study of electrostatically driven MEMS microengines, MS Thesis, Worcester Polytechnic Institute, Worcester, MA, 2000.Google Scholar
14. Pryputniewicz, R. J., deBoer, M. P., and Brown, G. C., Proc. SEM: IX Internat. Congress on Exp. Mech., pp. 1009–1012, 2000.Google Scholar
15. Pryputniewicz, E. J., Miller, S. L., deBoer, M. P., Brown, G. C., Biederman, R. R., and Pryputniewicz, R. J., Proc. SEM: Internat. Symp. on Microscale Systems. 80–83, 2000.Google Scholar