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Controlled Assemble and Microfabrication of Zeolite Nanoparticles on SiO2 Substrates for Potential Biosensor Applications

Published online by Cambridge University Press:  01 February 2011

Seckin Ozturk ,
Kubra Kamisoglu ,
Rasit Turan  and
Burcu Akata
Seckin Ozturk
Affiliation:
seckin@metu.edu.tr, Middle East Technical University, Micro and Nanotechnology Department, Ankara, Turkey
Kubra Kamisoglu
Affiliation:
kubra@eden.rutgers.edu, Middle East Technical University, Chemical Engineering Department, Ankara, Turkey
Rasit Turan
Affiliation:
turanr@metu.edu.tr, Middle East Technical University, Physics Department, Ankara, Turkey
Burcu Akata
Affiliation:
akata@metu.edu.tr, Middle East Technical University, Micro and Nanotechnology Department, Ankara, Turkey
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Abstract

Zeolite nanoparticles were organized into functional entities on SiO2 substrates and microfabrication technique was tested to form patterns of zeolite nanoparticles on SiO2 using the electron beam lithography (EBL). The effect of different techniques for efficient zeolite assembly on the SiO2 substrates was investigated. For this purpose, three different assembly techniques were tested. The first two methods are spin-coating (SC) and ultrasound aided strong agitation (US) methods, which were tested using bare and silanized zeolite nanoparticles. The third technique is the manual assembly method, which was also investigated using bare zeolites. All methods were facile in terms of experimental approach. Full coverage of the substrate was obtained after all three methods, however strong agitation (US) leads to better organization of zeolite nanoparticles. Among all techniques, manual assembly method lead to the most organized zeolite nanoparticles with full coverage. Although strong agitation (US) also results in organized zeolite entities, it was not found to be a suitable technique for EBL studies. Using the manual assembly method, it was possible to form monolayers of zeolite nanoparticles on SiO2 and to make patterns of zeolite nanoparticles by EBL, which offers a simple technique to engineer the surfaces for immobilization of biomolecules.

Keywords

zeolitethin filmlithography (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1129: Symposium V – Materials and Devices for Smart Systems III , 2008 , 1129-V03-02
Copyright
Copyright © Materials Research Society 2009

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References

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