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Convection Effects in Epitaxial Reactors: an Experimental and Theoretical Study

Published online by Cambridge University Press:  26 February 2011

P. B. Chinoy ,
P. D. Agnello  and
S. K. Ghandhia
P. B. Chinoy
Affiliation:
Rensselaer Polytechnic Institute, Troy, NY 12180.
P. D. Agnello
Affiliation:
Rensselaer Polytechnic Institute, Troy, NY 12180.
S. K. Ghandhia
Affiliation:
Rensselaer Polytechnic Institute, Troy, NY 12180.
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Abstract

An experimental and theoretical study has been undertaken of the effects of natural and forced convection in horizontal epitaxial reactors. The epitaxial growth of GaAs was used as the experimental vehicle for this study. A mathematical model for mass, momentum and energy transfer in the reactor was developed. Excellent correlation between modeled and experimental results was demonstrated over a wide range of reactor pressures and susceptor geometries. Recirculation of hot gases, caused by natural convection, was found to result in a strong pressure dependence of growth rate at higher susceptor slopes. Low reactor pressures have been shown to be a more effective way to eliminate recirculation than high gas flow rates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 144: Symposium W – Advances in Materials, Processing and Devices in III-V Compound Semiconductors , 1988 , 109
Copyright
Copyright © Materials Research Society 1989

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References

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