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Correlation and Spectral-Density Roughness Analysis of Surfaces Processed With Gas-Cluster Ion Beams

Published online by Cambridge University Press:  01 February 2011

D. B. Fenner
D. B. Fenner*
Affiliation:
Epion Corporation, 37 Manning Road, Billerica, MA 01821, and Physics Department, University of Connecticut, Storrs, CT 06269
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Abstract

Autocorrelation, height-difference correlation, and power spectral density are used to characterize various surfaces exposed to gas-cluster ion beams (GCIB), as well as for detailed comparison with simulated surfaces which are based on models with stochastic impact and surface mobility mechanisms. This work demonstrates a close correspondance between detailed statistical analysis of AFM images from actual surfaces and the results of the same types of analysis of simulated surfaces. Surface roughness prior to and after GCIB treatment is always found to be essentially fractal in nature. Phenomenological models with both continuum surface mobility and Monte Carlo impact accumulations are presented. Accurate simulation of smoothing requires a combination of these models.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 792: Symposium R – Radiation Effects and Ion Beam Processing of Materials , 2003 , R9.32
Copyright
Copyright © Materials Research Society 2004

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References

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