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Creation of Patterned Gold Nanostructures via Electron-Beam-Induced Deposition

Published online by Cambridge University Press:  15 May 2013

Anastasia V. Riazanova ,
Johannes J. L. Mulders  and
Lyubov M. Belova
Anastasia V. Riazanova
Affiliation:
Department of Materials Science and Engineering, KTH – Royal Institute of Technology, Brinellvägen 23, Stockholm, 100 44, Sweden.
Johannes J. L. Mulders
Affiliation:
FEI Electron Optics, Achtseweg Noord 5, Eindhoven, 5600 KA, The Netherlands.
Lyubov M. Belova
Affiliation:
Department of Materials Science and Engineering, KTH – Royal Institute of Technology, Brinellvägen 23, Stockholm, 100 44, Sweden. FEI Electron Optics, Achtseweg Noord 5, Eindhoven, 5600 KA, The Netherlands.
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Abstract

One of the methods to grow nanoscale three-dimensional (3D) Au patterns is to perform local electron-beam-induced deposition (EBID) using the Me2Au(acac) precursor inside the chamber of a scanning electron microscope (SEM). However, due to the organometallic nature of the chemical, the concentration of the metallic constituent in the as-deposited structure is dramatically low, at around 10 at. % of Au. Ex-situ post-annealing of Me2Au(acac) EBIDs is a very promising purification approach, resulting in an Au content of > 92 at. % after annealing at 600 °C. However, in most of the cases it also distorts the geometrical shape of the heat-treated structure, preserving of which is essential for the application. In this paper we present a systematic study of the dependence between the annealing parameters and resulting purity in combination with the shape of the Au structure. Optimized heat treatment conditions for the creation of well-purified high aspect ratio Au pillar array are presented; and for planar continuous structures, the importance of the parameter height to area ratio is identified.

Keywords

Aunanostructurepurification
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1546: Symposium L – Nanoparticle Manufacturing, Functionalization, Assembly and Integration , 2013 , mrss13-1546-l06-35
Copyright
Copyright © Materials Research Society 2013 

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References

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