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Crystalline Particles in Thermally Grown Silicon Dioxide

Published online by Cambridge University Press:  15 February 2011

F. A. Ponce  and
T. Yamashita
F. A. Ponce
Affiliation:
Materials Research Laboratory, Hewlett-Packard Laboratories1501 Page Mill Road, Palo Alto, California 94304, USA
T. Yamashita
Affiliation:
Materials Research Laboratory, Hewlett-Packard Laboratories1501 Page Mill Road, Palo Alto, California 94304, USA
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Abstract

Small crystalline particles in the vicinity of the Si/SiO2 interface have been directly observed by high resolution transmission electron microscopy. These crystallites have typical diameters between 20 and 120 Å. Based on the observed interplanar spacings and angles in lattice images, the structure of these particles has been found to match those of cristobalite. Some orientation relationships also appear to exist between these particles and the silicon layer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 14: Symposium B – Defects in Semiconductors II , 1982 , 201
Copyright
Copyright © Materials Research Society 1982

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References

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