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Deposition and Evaluation of Micro-Crystalline Silicon for Use in Photoconducting Antennas

Published online by Cambridge University Press:  10 February 2011

Sripathi Yarasi  and
Tajinder Manku
Sripathi Yarasi
Affiliation:
Electrical and Computer Engineering Department, University of Waterloo Waterloo, Ontario N2L 3G 1, CANADA. syarasi@venus.uwaterloo.ca
Tajinder Manku
Affiliation:
Electrical and Computer Engineering Department, University of Waterloo Waterloo, Ontario N2L 3G 1, CANADA
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Abstract

The importance of micro-crystalline silicon (μc-Si:H) for the photo-conducting dipole antenna application is investigated in this paper. The structural and optical properties of gc-Si:H films prepared by plasma enhanced chemical vapor deposition are studied with Raman spectra, scanning electron microscope, and ellipsometer measurements. The influence of grain size and defects on the opto-electronic characteristics of the photo-conducting dipole antenna is discussed. A sample of the antenna fabricated in our clean room laboratory is reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 507: Symposium A – Amorphous & Microcrystalline Silicon Technology 1998 , 1998 , 315
Copyright
Copyright © Materials Research Society 1998

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References

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