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Determination of the Composition and Thickness of Thin Potassium Polyphosphide Films

Published online by Cambridge University Press:  22 February 2011

Klara Kiss  and
Paul M. Figura
Klara Kiss
Affiliation:
Stauffer Chemical Co., Dobbs Ferry, NY 10522
Paul M. Figura
Affiliation:
Stauffer Chemical Co., Dobbs Ferry, NY 10522
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Extract

An energy dispersive X-ray microprobe (EDX) analysis was developed to determine simultaneously the lateral uniformity of the thickness and the composition of thin potassium polyphosphide(KPx) films. The EDX analysis was based on theoretical calibration curves generated by the Monte Carlo simulation approach developed by Kyser and Murata and extended by Miller and Koffman. Simultaneous determination of both composition and thickness was possible for this binary-element thin film due to the concentration independence of the theoretical intensity ratio of

The EDX results were compared to macro techniques applied routinely in the characterization of thin films, i.e., piezoelectric thickness measurement and compositional analysis via X-ray fluorescence spectroscopy (XRF). A special XRF technique was developed to determine the weight ratios from fluorescent intensity measurements “directly” using “bulk” standards instead of thin film standards. The accuracy of this technique was demonstrated for an indium phosphide standard film since no certified KPx standard films are available.

The comparison was carried out on films of widely different thicknesses (0.26–2.0 um) and compositions (KP5–KP83). A Student's t test demonstrated that the compared techniques were identical at the 95% confidence level for the determinations of both thickness and composition. Thus, EDX analysis can be used to complement the macro techniques when the lateral uniformity of the thin films is to be determined at the micron scale.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 48: Symposium E – Applied Materials Characterization , 1985 , 145
Copyright
Copyright © Materials Research Society 1985

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References

REFERENCES

1. Schachter, R. et al. Appl. Phys. Lett. 45, (3) August 1, 1984.Google Scholar
2. To be published in J. of Appl. Phys., June 1985.Google Scholar
3. von Schneering, H. G. and Schmidt, H., Angev. Chem. Int. Ed. 6 356 (1967).Google Scholar
4. Kyser, D. F. and Murata, K. “Quantitative Electron Microprobe Analysis on Thin Films on Substrates” IBM J. Research and Development, 78, 352 (1974).Google Scholar
5. Murata, K., Sato, T. and Nagamie, K. “A Simple Quantitative Electron Microprobe Analysis of Multielement Thin Films on Substrate” Japan J. Appl. Phys. 15 No. 11 (1976).Google Scholar
6. Kyser, D. F., and Murata, K. “Quantitative Electron Microprobe Analysis of Thin Films with Monte Carlo Calculations” Proceedings of the 8th MAS Conference, 116, (1977).Google Scholar
7. Miller, N.C., and Koffman, D.M. “Determination of Thin- Film Composition or Thickness from Electron Probe Data by Monte Carlo Calculations” Microbeam Analysis, Newberry, Dale E., Ed. 1979, p. 41.Google Scholar
8. Phil, C. and Cvikevich, S. “Monte Carlo Simulation Approach to Quantitative Electron Microprobe Analysis of Ternary Alloy Thin Films” Microbeam Analysis, Wittry, David B., Ed. 1980, p. 161.Google Scholar
9. Heinrich, K. F. J., Newberry, D. E. and Yakovitz, H. “Use of Monte Carlo Calculations in Electron Probe Analysis" in Microanalysis and Scanning Electron Microscopy” NBS Special Publication 460 (1976).Google Scholar
10. Honig, R. E. Thin Solid Films, 31, 89 (1976).Google Scholar
11. Stankiewicz, W. et al. X-Ray Spectrometry, 12, 92 (1983).Google Scholar
12. Verheijke, M. L., and Witmer, A. W. W. Spectrochimica Acta, 33B, 817 (1978).Google Scholar
13. Laguitton, D. and Parrish, W. Analytical Chemistry, 49, 1162 (1977).Google Scholar
14. Kalnicky, D. J. and Monsteles, T. D. Analytical Chemistry, 53, 1782 (1981).Google Scholar
15. Hwang, T. C. and Parrish, W. Advances in X-Ray Analysis, 22, 43 (1979).Google Scholar
16. Jenkins, K. et al. “Quantitative X-Ray Spectrometry” Marcel-Dekker, Inc., New York, (1981).Google Scholar