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Dome-like PVDF Actuators: Preparation, Phase Transformation and Piezoelectric Properties

Published online by Cambridge University Press:  31 January 2011

Michael Wegener ,
Robert Schwerdtner ,
Martin Schueller  and
Andreas Morschhauser
Michael Wegener
Affiliation:
michael.wegener@iap.fraunhofer.de, Fraunhofer IAP, Functional Materials and Devices, Potsdam, Germany
Robert Schwerdtner
Affiliation:
robert.schwerdtner@zfm.tu-chemnitzde, Chemnitz University of Technology, Center for Microtechnologies, Chemnitz, Germany
Martin Schueller
Affiliation:
martin.schueller@enas.fraunhofer.de, Fraunhofer ENAS, Multi Device Integration, Chemnitz, Germany
Andreas Morschhauser
Affiliation:
andreas.morschhauser@enas.fraunhofer.de, Chemnitz University of Technology, Center for Microtechnologies, Chemnitz, Germany
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Abstract

In this work, dome structures in PVDF films were prepared as ultrasonic transducer. The domes are realized by a deep-drawing process. The dome-forming process leads to a phase transformation from the non-polar α into the polar β phase within dome wall and roof of the PVDF films. A ferroelectric polarization is obtained in these dome areas after suitable electrical poling which yields a piezoelectric activity. Because of the piezoelectric activity within the film plane, a dome-roof up-and-down actuation is observed with resonance frequencies in the range between 65 and 93 kHz.

Keywords

piezoelectricpolymeractuator
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1190: Symposium NN – Active Polymers , 2009 , 1190-NN08-03
Copyright
Copyright © Materials Research Society 2009

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