No CrossRef data available.
Article contents
Effect of O2 on thickness uniformity of CdTe thin film deposited using CSS
Published online by Cambridge University Press: 31 January 2011
Abstract
Incorporating O2 in the closed space sublimation (CSS) of CdTe thin film has resulted in improved cell efficiencies. Many studies have been undertaken to understand this effect on cell efficiency. In this work we study the effect of oxygen on lateral uniformity of the deposited CdTe film. A finite element model has been developed to represent the mass and heat transfers involved in the CSS process. The model takes into consideration the effect of O2 by modeling its reaction with Cd vapors in the space between the source and the substrates and with the CdTe source. So a gradient of O2 from the edges to the center of the substrate can result in non-uniform oxidation of the source and subsequently a laterally non-uniform film. A steady state model solved at various temperatures, pressures, and separation distances. O2 concentration gradient was found to depend on the oxidation rate of Cd vapors and thus on temperature, total pressure, and oxygen partial pressure in the system.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 2010