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Electrical and Structural Properties of Ta-doped SnO2 Transparent Conductive Thin Films by Pulsed Laser Deposition

Published online by Cambridge University Press:  20 March 2014

Shoichiro Nakao ,
Naoomi Yamada ,
Yasushi Hirose  and
Tetsuya Hasegawa
Shoichiro Nakao
Affiliation:
Kanagawa Academy of Science and Technology (KAST) 3-2-1 Sakado, Kawasaki, Kanagawa 213-0012, Japan Japan Science and Technology Agency, CREST 7-3-1 Hongo, Tokyo 113-0033, Japan
Naoomi Yamada
Affiliation:
Department of Applied Chemistry, Chubu University 1200 Matsumoto, Kasugai, Aichi 487-8501, Japan
Yasushi Hirose
Affiliation:
Kanagawa Academy of Science and Technology (KAST) 3-2-1 Sakado, Kawasaki, Kanagawa 213-0012, Japan Japan Science and Technology Agency, CREST 7-3-1 Hongo, Tokyo 113-0033, Japan Department of Chemistry, The University of Tokyo 7-3-1 Hongo, Tokyo 113-0033, Japan
Tetsuya Hasegawa
Affiliation:
Kanagawa Academy of Science and Technology (KAST) 3-2-1 Sakado, Kawasaki, Kanagawa 213-0012, Japan Japan Science and Technology Agency, CREST 7-3-1 Hongo, Tokyo 113-0033, Japan Department of Chemistry, The University of Tokyo 7-3-1 Hongo, Tokyo 113-0033, Japan
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Abstract

We investigated electrical and structural properties of Ta-doped SnO2 (TTO) films on anatase TiO2 seed layers with various growth parameters of pulsed laser deposition. We found that anatase TiO2 seed layers induced pseudo-epitaxial (100) growth of TTO films with enhanced mobility (μ) in a wide range of growth parameters. The highest μ of 83 cm2V-1s-1 [resistivity (ρ) of 2.8 × 10-4 Ωcm] and the lowest ρ of 1.8 × 10-4 Ωcm (μ of 60 cm2V-1s-1) were obtained at a substrate temperature of 600 °C. Amorphization and (101)-preferred growth competed with (100) growth on the TiO2 seed layer at low temperatures. Introducing sufficient process oxygen suppressed such unwanted film growth, resulting in improved transport properties.

Keywords

transparent conductorthin filmlaser ablation
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1604: Symposium U – Transparent Contacts for Electronics and Renewable Energy Technologies , 2014 , jsapmrs13-1604-6345
Copyright
Copyright © Materials Research Society 2014 

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